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Home / Products / Composite copper foil equipment / Vacuum Roll to Roll Double-sided Sputtering & E/B Evaporation combined systerm)(Capable of double-sided copper & aluminum plating)

Vacuum Roll to Roll Double-sided Sputtering & E/B Evaporation combined systerm)(Capable of double-sided copper & aluminum plating)

A vacuum coating machine mainly refers to a type of coating that needs to be carried out under a higher vacuum degree. There are many types, including vacuum resistance heating evaporation, electron gun heating evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition, ion beam sputtering, and many other types. The main idea is to divide it into two types: evaporation and sputtering.
The substrate to be coated is called the substrate, and the material to be coated is called the target. The substrate and the target are in the vacuum chamber.
Evaporation coating generally heats the target material to evaporate the surface components in the form of atomic groups or ions. It settles on the surface of the substrate and forms a thin film through the film-forming process (scattered points-island structure-vagal structure-layered growth). Sputtering coating, can be simply understood as bombarding the target material with electrons or high-energy lasers sputtering the surface components in the form of atomic groups or ions, and finally depositing them on the surface of the substrate, undergoing the film-forming process, and finally forming a thin film.

Product parameter
Substrate Material PET/PP 3 μm~ 12μm 
Width 1350mm (effective deposition width: 1300mm)
Line Speed 15m/min (on each side 1μm x both sides)
Production capacity: about 710,000m2/month
Specification of coating 150KW EB GUN 4set
Operating air pressure: 0.005~ 0.01Pa
Surface treatment lon Bombardment
Membrane performance Membrane composition: adhesion layer (SP)/electrode layer Cu (evaporation)/protective layer (SP)
Thickness distribution:±10 %
Membrane resistance: 25mΩ□
Hongtian Technology Co., Ltd.

About Us

Hongtian Technology Co., Ltd. is China Vacuum Roll to Roll Double-sided Sputtering & E/B Evaporation combined systerm)(Capable of double-sided copper & aluminum plating) Manufacturers and Vacuum Roll to Roll Double-sided Sputtering & E/B Evaporation combined systerm)(Capable of double-sided copper & aluminum plating) Suppliers. And it was established in 2012, with a registered capital of 10 million yuan, is a national high-tech enterprise.
Headquartered in Shanghai, China, the company has a number of wholly-owned and holding subsidiaries in Nantong, Yancheng and other places in Jiangsu Province, and has established R & D centers in China and Japan to layout the global market. At present, the company has grown into a well-known domestic new energy intelligent equipment manufacturer, and is a enterprise in the field of lithium copper foil equipment in the country. The company's core technical team led by Mr. Matsuda Mitsuya in Nagoya, Japan, focuses on the development and integration of high-end manufacturing equipment and automation system in the field of high precision electromechanical equipment. Through the introduction of Japanese advanced technology and design concepts and the import of original precision parts from Japan, the various equipment products produced by the company have become industry benchmarks.

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Industry knowledge

1. What is the Vacuum Roll to Roll double-sided sputtering and electron beam evaporation combined system?
The Vacuum Roll to Roll double-sided sputtering and electron beam evaporation combined system is a highly integrated advanced coating equipment that combines two vacuum coating technologies, sputtering and electron beam evaporation. With its high precision and high efficiency, the system is widely used in optics, electronics, materials and other industries, especially in applications with high requirements for film quality. As an innovative solution provided by Hongtian Technology Co., Ltd., this system integrates intelligent manufacturing and high-end customization functions, and can provide customers with flexible production capabilities and excellent film quality.
In this system, sputtering coating and electron beam evaporation coating technologies are cleverly combined. Sputtering coating technology bombards the target material with high-energy ions or electron beams, breaks up the atoms or ions on the surface of the target material, and deposits them on the surface of the substrate to form a uniform film. Electron beam evaporation technology converts the substance into steam by heating the target material to the evaporation temperature, and the steam is deposited on the surface of the substrate under a vacuum environment. The combination of these two technologies can not only improve the adhesion of the film, but also effectively reduce the contamination of impurities during the coating process, and improve the uniformity and density of the film layer.
Hongtian Technology Co., Ltd. relies on its high-end customization and intelligent manufacturing capabilities to tailor coating systems to meet special needs for customers. The company is committed to promoting the development of the industry and providing continuous value creation for customers through technological innovation and process assurance. This system can flexibly adjust coating parameters according to customer needs to ensure that the film quality of each batch of products can meet the highest standards and meet the strict requirements of different industries for coating performance.

2. How to ensure high efficiency and uniformity of coating?
The high efficiency and uniformity of the Vacuum Roll to Roll double-sided sputtering and electron beam evaporation combined system are guaranteed through multiple aspects of design and technology. The equipment adopts double-sided coating technology, which can coat both sides of the substrate at the same time, greatly improving production efficiency. This design is particularly suitable for customers with high production requirements. Through double-sided coating, the production cycle is significantly shortened, thereby improving the overall production capacity and meeting the needs of mass production.
The equipment maintains a high vacuum environment (0.005~0.01Pa) during operation. This vacuum environment can effectively reduce the collision between gas molecules, so that the substances generated during the evaporation and sputtering processes can be deposited on the surface of the substrate more purely and evenly. . In this environment, the adhesion and uniformity of the film layer are significantly improved, and the introduction of contaminants can be effectively prevented, thus ensuring the high quality and purity of the coating.
The equipment's intelligent control system is an important part of ensuring coating uniformity and efficiency. By precisely controlling the temperature of the evaporation source, the power of the sputtering source, and the pressure of the vacuum environment, the system can achieve precise adjustment of coating parameters to ensure stable film thickness and performance. Hongtian Technology Co., Ltd.'s products use advanced sensors and feedback control technology to achieve real-time monitoring and automatic adjustment of the coating process, further improving coating consistency and production efficiency.
The system’s membrane structure design is also very critical. Through the rationally designed coating structure, such as adhesion layer, electrode layer copper (Cu), protective layer, etc., the film not only has excellent physical properties, but also maintains long-term stability in harsh environments such as high temperature and high humidity. . The accuracy of the film thickness distribution is controlled within ±10%, and the resistance value is stable at 25mΩ□, providing customers with reliable film performance.

3. Which industries and applications is it suitable for?
Vacuum Roll to Roll Double-sided sputtering and electron beam evaporation combined system is widely used in many industries, especially in areas where high-precision coatings are required. As an iconic piece of equipment of Hongtian Technology Co., Ltd., it not only supports efficient production modes, but also provides highly customized solutions to meet customers' special needs in different applications.
This equipment is widely used in the optical industry, especially in the production of high-performance optical coatings and reflective films, anti-reflective films, etc. During the production of optical components, coating uniformity and adhesion are critical. By combining sputtering and electron beam evaporation technologies, Hongtian Technology Co., Ltd.'s equipment is able to ensure high quality and high purity of coatings, meeting the high requirements for coating performance in the optical industry.
In the electronics industry, this system can provide high-precision metal electrode layers and protective layers for electronic components, displays, sensors and other equipment. Because the equipment adopts double-sided coating technology, it can complete the processing of both sides of the coating in a short time, significantly improving production efficiency. For electronic products that require stable conductivity and long-term reliability, the high-quality coating provided by the equipment can significantly improve the performance and service life of the product.
In the energy field, especially in the production of solar cells and fuel cells, the quality of thin film coatings directly affects the performance and efficiency of the cells. By using the Vacuum Roll to Roll double-sided sputtering and electron beam evaporation combined system, high-quality electrode films and functional films can be produced to improve the efficiency and stability of energy devices.
Hongtian Technology Co., Ltd. is also committed to application development in the automotive industry and aerospace industry. This system can provide high-quality metal films and protective films for automotive parts, aerospace equipment, etc., enhancing their corrosion resistance and durability. Due to the highly intelligent and customized functions of the system, customers can adjust the type and performance of the film layer according to their own needs to meet the individual needs of different industries for thin film coatings.
Product specifications and performance features
Base material: PET/PP, thickness range: 3 μm~12μm
Width: 1350mm (effective deposition width: 1300mm)
Production speed: 15m/min (coating 1μm on each side)
Production capacity: about 710,000m²/month
Evaporation source: 150KW EB GUN 4 sets
Operating air pressure: 0.005~0.01Pa
Surface treatment: ion bombardment treatment
Film performance: Film composition: adhesion layer (SP)/electrode layer copper (Cu)/protective layer (SP), film thickness distribution: ±10%, film resistance: 25mΩ□