Language

0515-83835888
Home / Products / Composite copper foil equipment / Vacuum Roll to Roll Double-Sided Sputtering System)(Capable of double-sided matal plating materials

Vacuum Roll to Roll Double-Sided Sputtering System)(Capable of double-sided matal plating materials

Working principle of magnetron sputtering vacuum coating machine

The working principle of a magnetron sputtering vacuum coating machine is to use a magnetic field and target material to deposit material on the substrate by sputtering.
The specific working principle is as follows:
1. Prepare vacuum environment: Place the substrate to be processed in a vacuum chamber, and evacuate the vacuum chamber through the exhaust system to form a vacuum environment.
2. Heat the target material: The target heating device in the vacuum chamber heats the target material to reach the evaporation temperature.
3. Generate a magnetic field: Place a magnetic field device near the target material, and apply a magnetic field to form a magnetic field area on the surface of the target material.
4. Sputtering process: When the target material reaches the evaporation temperature, the atoms on the surface of the target material begin to evaporate and form plasma under the action of the magnetic field. These plasmas will impact or sputter out atoms or molecules of the target material.
5. Deposition on the substrate: Subsequently, the sputtered atoms or molecules are deposited on the surface of the substrate to form the desired film.
By controlling the process parameters of sputtering, such as the temperature of the target material, sputtering power, gas pressure, etc., the thickness, composition, and structure of the deposited film can be controlled.
In general, magnetron sputtering vacuum coating machines heat and evaporate the target material, and deposit the sputtered atoms or molecules on the substrate under the action of the magnetic field to achieve the preparation of thin films.

Product parameter
Substrate Material PET/PP 3 μm~ 12μm 
Width 1350mm (effective deposition width: 1300mm)
Line Speed 2m/min (on each side 1μm x both sides)
Production capacity: about 95,000m2/month
Specification of coating Rotary Magnetron Sputtering Cathode 32set
Operating air pressure: 0.5~ 1.0Pa
Surface treatment Heater or lon Bombardment
Membrane performance Membrane composition: adhesion layer (SP)/electrode layer Cu (evaporation)/protective layer (SP)
Thickness distribution:±5 %
Membrane resistance: 25mΩ□
Hongtian Technology Co., Ltd.

About Us

Hongtian Technology Co., Ltd. is China Vacuum Roll to Roll Double-Sided Sputtering System)(Capable of double-sided matal plating materials Manufacturers and Vacuum Roll to Roll Double-Sided Sputtering System)(Capable of double-sided matal plating materials Suppliers. And it was established in 2012, with a registered capital of 10 million yuan, is a national high-tech enterprise.
Headquartered in Shanghai, China, the company has a number of wholly-owned and holding subsidiaries in Nantong, Yancheng and other places in Jiangsu Province, and has established R & D centers in China and Japan to layout the global market. At present, the company has grown into a well-known domestic new energy intelligent equipment manufacturer, and is a enterprise in the field of lithium copper foil equipment in the country. The company's core technical team led by Mr. Matsuda Mitsuya in Nagoya, Japan, focuses on the development and integration of high-end manufacturing equipment and automation system in the field of high precision electromechanical equipment. Through the introduction of Japanese advanced technology and design concepts and the import of original precision parts from Japan, the various equipment products produced by the company have become industry benchmarks.

Honor

  • honor
    Patent Certificate
  • honor
    Patent Certificate
  • honor
    Patent Certificate
  • honor
    Patent Certificate
  • honor
    Patent Certificate
  • honor
    Patent Certificate
  • honor
    Patent Certificate
  • honor
    Patent Certificate

News

Contact us now

Industry knowledge

1. Creating a Controlled Vacuum Environment
The first step in the magnetron sputtering process is to create a controlled vacuum environment. The vacuum chamber, which is integral to the coating process, houses the substrate and the target material. When preparing the chamber, it is evacuated using a sophisticated exhaust system to achieve a high degree of vacuum. The vacuum is necessary to eliminate air particles, dust, or any form of contamination that could interfere with the quality of the thin film deposition.
Creating this vacuum also allows the Vacuum Roll to Roll Double-Sided Sputtering System to operate with minimal resistance, making the deposition process more efficient. It prevents oxidation of the target material and ensures that only the sputtered atoms from the target material are deposited on the substrate. In the case of Hongtian Technology Co., Ltd., the vacuum environment typically ranges from 0.5 to 1.0 Pa, a pressure range that is optimal for sputtering metal layers like copper or aluminum.
Once the chamber is under the desired vacuum, the substrate is carefully aligned to ensure uniform coating. Substrates such as PET (Polyethylene Terephthalate) or PP (Polypropylene), typically in thicknesses ranging from 3 μm to 12 μm, are moved continuously during the coating process. The vacuum ensures that the coating is applied consistently across the entire surface area of the substrate. The Vacuum Roll to Roll Double-Sided Sputtering System is designed for high-speed operations, with a line speed of around 2 meters per minute. This makes it ideal for large-scale production, with Hongtian Technology Co., Ltd.’s system capable of coating approximately 95,000 square meters per month.
By controlling the vacuum, the system minimizes any potential contamination and provides a clean, stable environment for the sputtering process, ensuring that the final coated film meets the required specifications for thickness, uniformity, and adhesion.

2. Magnetron Sputtering Process: Material Deposition
Once the vacuum environment is set up, the sputtering process begins. Hongtian Technology Co., Ltd. utilizes a Rotary Magnetron Sputtering Cathode with 32 sets of magnetrons, which are strategically placed to ensure uniform material deposition on both sides of the substrate. The sputtering process starts when an inert gas, typically argon, is introduced into the vacuum chamber. A high voltage is applied to the target material, causing the gas ions to become ionized.
The ionized gas molecules then collide with the target material, dislodging atoms from the target surface. These atoms are then ejected and travel through the vacuum to the substrate, where they condense and form a thin, uniform coating. The process is highly controlled, with Hongtian Technology Co., Ltd. ensuring that the coating thickness is kept within a precise tolerance range of ±5%, allowing for consistent quality throughout production.
One of the key advantages of the magnetron sputtering process is its ability to coat both sides of the substrate simultaneously. This dual-sided sputtering significantly increases efficiency and reduces production time, which is a major benefit for industries requiring large volumes of coated materials. The target material used in sputtering can vary depending on the application; for instance, copper (Cu) is commonly used as an electrode material, while other materials may be used for protective layers. Hongtian Technology Co., Ltd. ensures that the target materials are heated adequately, providing optimal conditions for sputtering.
In addition to standard metal coatings, the system also accommodates the deposition of complex multi-layer films, such as adhesion layers (SP), electrode layers (Cu), and protective layers (SP). This layered approach enhances the performance of the coating, improving its durability, electrical conductivity, and resistance to corrosion. The Rotary Magnetron Sputtering Cathode ensures that the deposition is uniform and consistent across both sides of the substrate, allowing Hongtian Technology Co., Ltd. to produce high-quality coated materials that meet the strict standards of various industries.

3. Optimizing Coating Quality and Performance
Ensuring the quality and performance of the coating is a critical part of the sputtering process. The system is equipped with features designed to enhance the adhesion and durability of the thin films applied to the substrates. After the material is sputtered onto the substrate, Hongtian Technology Co., Ltd. employs a heating or ion bombardment treatment to improve the adhesion between the coating and the substrate. This step is essential for ensuring that the coating remains intact during subsequent handling or application, particularly in demanding environments.
The coating’s composition typically consists of an adhesion layer (SP), a conductive electrode layer (Cu), and a protective layer (SP). This combination of layers provides several benefits, including improved mechanical strength, electrical conductivity, and resistance to wear and corrosion. The protective layer ensures that the coating is resistant to environmental factors like moisture, dust, and temperature fluctuations, which is particularly important in industries like electronics and automotive.
Hongtian Technology Co., Ltd. places a high emphasis on controlling the uniformity and thickness of the coating. With a membrane thickness distribution tolerance of ±5%, the system ensures that every substrate processed under its Vacuum Roll to Roll Double-Sided Sputtering System receives a consistent coating. This precision is essential for applications where uniformity and reliability are crucial, such as in the production of semiconductors, solar panels, or decorative finishes in automotive parts.
The resistance of the final coating is typically around 25 mΩ□, a value that ensures low electrical resistance and excellent conductivity, which is essential for applications in electronics and energy storage systems. The high level of control over the coating process and the ability to produce large quantities of high-quality material make Hongtian Technology Co., Ltd.’s technology an ideal choice for industries that demand precision, reliability, and efficiency.